Characterization of off-axis single target RF magnetron co-sputtered iron doped tin oxide films

• Published in: Surface & coatings technology Vol. 205; pp. S120 - S124
• Main Authors: Kormunda, Martin, Pavlik, Jaroslav, Mackova, Anna, Malinsky, Petr
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 25.12.2010; Elsevier
• Subjects: Amorphous stannic oxide; Annealing; Applied sciences; Bonding; Coatings; Cross-disciplinary physics: materials science; rheology; Deposition; Exact sciences and technology; Gas sensors; Iron; Magnetron co-sputtering; Materials science; Metals. Metallurgy; Methods of deposition of films and coatings; film growth and epitaxy; Off-axis deposition; Physics; Production techniques; Radio frequencies; Surface treatment; Surface treatments; Tin dioxide; Tin oxides; X-ray photoelectron spectroscopy; Amorphous stannic oxide; Gas sensors; Magnetron co-sputtering; Off-axis deposition; Iron oxide; Oxide layer; Doping; Titanium nitride; Surface treatments; Sputtering; Thin films; Magnetrons; Tin oxide; Physical vapor deposition; Oxidation
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2010.06.040

The iron doped SnO 2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO 2 target with an iron inset. Two different off-axis deposition arrangements were investigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducible and deposited substoichiometric Fe:SnO 2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 h had no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably α-Fe 2O 3 bonding structure.