Deep microstructuring in glass for microfluidic applications

• Published in: Microsystem technologies Vol. 13; no. 5-6; pp. 447 - 453
• Main Authors: KHAN MALEK, Chantal, ROBERT, Laurent, BOY, Jean-Jacques, BLIND, Pascal
• Format: Conference Proceeding Journal Article
• Language: English
• Published: Berlin Springer 01.03.2007; Springer Verlag
• Subjects: Applied fluid mechanics; Applied sciences; Electronics; Engineering Sciences; Exact sciences and technology; Fluid dynamics; Fluidics; Fundamental areas of phenomenology (including applications); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Micro and nanotechnologies; Microelectronic fabrication (materials and surfaces technology); Microelectronics; Micromechanical devices and systems; Other; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Dimethylsiloxane polymer; Photofabrication; Micromachining; System on a chip; Surface metrology; Borosilicate glass; Surface states; Photosensitive material; Photolithography; Pyrex; Profilometry; Microfluidics; Erosion; Fluidics; glass; Foturan; ultrasonic micromachining; microfluidics
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-006-0185-0

Glass is widely used as a structural and functional material in micro-total-analysis-systems (µTAS). Two low-cost techniques have been used to produce deep and vertical micro-structures into glass. A commercially available photosensitive glass (Foturan) is patterned by photolithography and etched in an HF solution for the construction of a microfluidic component. Channels and reservoirs were bonded to a PDMS cover. A two-level structure with various depths (reservoirs and channels) was also made by a double exposure through two different masks. The other technique uses Micro-Ultra-Sonic Machining (MUSM) to form channels by erosion into borosilicate glass (Pyrex 7740). The two structuring techniques are compared with respect to surface profiles and surface states.