Hardware/Software Complex for Electrophysical Management of CMOS Technology on Test Structures

A combined procedural and hardware complex of electrophysical methods for management of submicrometric CMOS integrated circuit technology is developed and implemented. Programmable switching of the elements of the complex that makes it possible to utilize a mutually complementary measurement techniq...

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Bibliographic Details
Published inMeasurement techniques Vol. 59; no. 9; pp. 904 - 910
Main Authors Popovskikh, K. G., Soldatov, V. S., Oreshkov, M. V.
Format Journal Article
LanguageEnglish
Published New York Springer US 01.12.2016
Springer
Springer Nature B.V
Subjects
Analytical Chemistry
Automation
Characterization and Evaluation of Materials
CMOS
Complementary metal oxide semiconductors
Computer engineering
Computer programs
Electrodes
Electronics
Hardware
Integrated circuits
Linux
Management
Management methods
Mathematical analysis
Measurement Science and Instrumentation
Measurement techniques
Nanometrology
Network switches
Physical Chemistry
Physics
Physics and Astronomy
Semiconductor chips
Software
Studies
Switching
Technology
Test equipment
Transistors
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Summary:A combined procedural and hardware complex of electrophysical methods for management of submicrometric CMOS integrated circuit technology is developed and implemented. Programmable switching of the elements of the complex that makes it possible to utilize a mutually complementary measurement technique to obtain information needed to correct the production process is created. The complex includes programs to control the measurement and calculation of required characteristics.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
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ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-016-1065-3