A Method of Estimating the Stability of the Scale Factor of a Transmission Electron Microscope

A method of estimating the stability of the scale factor of the JEM-2100 transmission electron microscope using a test-object, constructed in the form of a thin section of a crystalline relief nanostructure with a known shape of the profile, is proposed. The results of an experimental estimate, obta...

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Published inMeasurement techniques Vol. 56; no. 5; pp. 482 - 485
Main Authors Zablotskii, A. V., Avilov, A. S., Bodunov, D. S., Kuzin, A. A., Kuzin, A. Yu, Kuz’min, A. A., Todua, P. A.
Format Journal Article
LanguageEnglish
Published Boston Springer US 01.08.2013
Springer
Springer Nature B.V
Subjects
Algorithms
Analysis
Analytical Chemistry
Characterization and Evaluation of Materials
Construction
Crystal structure
Electron microscopes
Estimates
Estimating
Experiments
Measurement Science and Instrumentation
Measurement techniques
Methods
Nanometrology
Nanostructure
Physical Chemistry
Physics
Physics and Astronomy
Stability
Statistical analysis
Studies
Transmission electron microscopes
United States > US
crystalline relief nanostructure
scale factor
transmission electron microscope
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Summary:A method of estimating the stability of the scale factor of the JEM-2100 transmission electron microscope using a test-object, constructed in the form of a thin section of a crystalline relief nanostructure with a known shape of the profile, is proposed. The results of an experimental estimate, obtained over a two-week period, are presented.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
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ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-013-0231-0