Investigation of the annealing effects on the structural and optical properties of sputtered ZnO thin films

• Published in: Journal of crystal growth Vol. 283; no. 3; pp. 384 - 389
• Main Authors: Jung, Mina, Lee, Juyoung, Park, Seungwhan, Kim, Hongseung, Chang, Jiho
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.10.2005; Elsevier
• Subjects: A1. Annealing; A1. Interdiffusion; A1. Microstructure; B1. ZnO; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Materials science; Methods of crystal growth; physics of crystal growth; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Physics; Transport properties of condensed matter (nonelectronic); 61.10.Kw; A1. Interdiffusion; B1. ZnO; 68.35.Bs; A1. Annealing; A1. Microstructure; Atomic force microscopy; Bl. ZnO; Annealing; Temperature; Inorganic compounds; Surface morphology; Al. Microstructure; Crystals; Transition element compounds; Photoluminescence; Interdiffusion; XRD; Substrates; 61.10.Kw Al. Annealing; Thin films; Zinc oxides; Al. Interdiffusion; Transmission electron microscopy; Optical properties; Surface properties; Silicon

Various effects of annealing on the optical and structural properties of sputtered ZnO layers have been investigated. ZnO layers were sputtered on Si (1 1 1) substrates and annealed at 700–900 °C under H 2O atmosphere. Optical and structural properties along with surface morphologies were estimated...