Annealing Transformation of Diamond-Like Carbon Using Ni Catalyst

We have considered diamond-like carbon (DLC) graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films. For DLC films, annealing at 350--450 °C was effective for improving the $I$(D)/$I$(G) ratio of their Raman spectra, and their surface roughness was unaffe...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 52; no. 12; pp. 128005 - 128005-2
Main Authors Sone, Junji, Shigeta, Naoto, Yamada, Katsumi, Uchida, Takayuki, Yoshida, Shinya, Hayasaka, Takeshi, Tanaka, Shuji
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.12.2013
Subjects
Annealing
Catalysts
Diamond-like carbon films
Graphitization
Nickel
Raman spectra
Surface roughness
Transformations
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Summary:We have considered diamond-like carbon (DLC) graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films. For DLC films, annealing at 350--450 °C was effective for improving the $I$(D)/$I$(G) ratio of their Raman spectra, and their surface roughness was unaffected by the annealing temperature.
Bibliography:(Color online) $I$(D)/$I$(G) ratio of Raman spectra of DLC films. (Color online) Surface roughness of DLC films.
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.52.128005