VUV and IR spectroellipsometric studies of polymer surfaces

This article reviews applications of spectroscopic ellipsometry (SE) in polymers and irradiated polymers. SE has long been used to determine optical constants, layer thicknesses in multi-layer stacks and microstructure (voids, alloy fraction, or mixed phase composition). Modern spectroscopic ellipso...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 208; pp. 35 - 39
Main Authors Woollam, John A., Bungay, Corey, Hilfiker, James, Tiwald, Tom
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.08.2003
Subjects
Depth profiles
Infrared spectroscopic ellipsometry
Optical anisotropy
Polymers
Vacuum ultraviolet
Visible
Vacuum ultraviolet
Visible
Polymers
Depth profiles
Infrared spectroscopic ellipsometry
Optical anisotropy
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Summary:This article reviews applications of spectroscopic ellipsometry (SE) in polymers and irradiated polymers. SE has long been used to determine optical constants, layer thicknesses in multi-layer stacks and microstructure (voids, alloy fraction, or mixed phase composition). Modern spectroscopic ellipsometers now cover a range from 140 nm (≈9 eV) in the vacuum ultraviolet to 100 μm (100 cm −1) in the far infrared. Examples of ellipsometric measurements for irradiated and un-irradiated thin film and bulk polymers, and biological materials are presented. Analysis yields index of refraction and dispersion, optical absorption and optical anisotropy as studied by “generalized ellipsometry”. Both ex situ and in situ ellipsometry are discussed, as are future trends and opportunities.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(03)00983-2