Analysis of image distortion on projection electron microscope image

Distortion of image obtained from a projection electron microscope (PEM) was investigated using an upgraded Monte Carlo simulation assembled with electron imaging optics (EO) data. A simulated PEM image distortion was reconstructed by the imaging on the image-plane through the EO. The image distorti...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 53; no. 11; pp. 116602 - 1-116602-9
Main Authors Iida, Susumu, Hirano, Ryoichi, Terasawa, Tsuneo, Amano, Tsuyoshi, Watanabe, Hidehiro
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.11.2014
Subjects
Charge
Computer simulation
Distortion
Electric potential
Electron microscopes
Extraction
Image degradation
Projection
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Summary:Distortion of image obtained from a projection electron microscope (PEM) was investigated using an upgraded Monte Carlo simulation assembled with electron imaging optics (EO) data. A simulated PEM image distortion was reconstructed by the imaging on the image-plane through the EO. The image distortion was created by a local field effect (Type II). The displacement of lines, contrast degradation, and changes in the line widths were simultaneously observed. In the case of a negative charge condition, these image degradations were enhanced by an increased gradient of the electric field produced by a local charge and an extraction voltage. The image distortion and the associated image degradation were improved by applying a 7.5-times higher extraction voltage.
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.53.116602