Magnetic field assisted increase of growth rate and reduction of particulate incorporation in pulsed laser deposited boron nitride films

The deflection of the ions ablated from an h-BN target in inhomogeneous magnetic fields was investigated, aimed finally at the reduction of the number of particulates in pulsed laser deposited c-BN films. As a large fraction of the ablated species are ions at the high laser pulse energy densities us...

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Published inApplied surface science Vol. 197; pp. 494 - 498
Main Authors Weißmantel, Steffen, Rost, Dirk, Reiße, Günter
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.09.2002
Subjects
Boron nitride films
Magnetic field
Particulates
Pulsed laser ablation
Particulates
Pulsed laser ablation
Boron nitride films
Magnetic field
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Summary:The deflection of the ions ablated from an h-BN target in inhomogeneous magnetic fields was investigated, aimed finally at the reduction of the number of particulates in pulsed laser deposited c-BN films. As a large fraction of the ablated species are ions at the high laser pulse energy densities used, the film growth rates can be significantly increased on substrates that are mounted above and sideways of the ablation area by using appropriate magnetic fields. Consequently, fewer laser pulses are needed for the deposition of films with the same thickness and the area density of particulate can be decreased.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(02)00324-0