Pressure sensor based on bipolar discharge corona configuration

• Published in: Sensors and actuators. A. Physical. Vol. 237; pp. 81 - 90
• Main Authors: Dau, Van Thanh, Bui, Tung Thanh, Dinh, Thien Xuan, Terebessy, Tibor
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.01.2016
• Subjects: Absolute pressure sensing; Bipolar corona discharge; Constants; Coronas; Deterioration; Devices; Discharge; Electrodes; Parallel pin electrode; Pressure sensors; Sensors; Bipolar corona discharge; Parallel pin electrode; Absolute pressure sensing
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2015.11.024

[Display omitted] •A novel bipolar micro corona based pressure sensing device.•Dual pins assembled in a polypropylene housing.•Reliable measurement has been verified by five prototypes in the pressure range of 80–105kPa, driven in constant current mode.•Its sensitivity of 0.016kV/kPa, is in good agreement with theoretical prediction. We present a pressure sensing unit based on a unique corona discharge setup using symmetrical electrode arrangement with simultaneous positive and negative corona generation. The device generates stable corona discharge and enables reliable air pressure measurement in the range of 80–105kPa, tested with five prototypes. The current–voltage characteristics of bipolar discharge system is analyzed in general form and three governing parameters, namely electrode geometry, electrode distance and discharge current, are studied in relation with absolute pressure. The sensors are driven with constant discharge current as low as 1μA. The measured sensitivity is in good agreement with theoretical prediction and the sensor stability has been confirmed with 20-h continuous test without sensitivity deterioration. The sensitivity does not depend on the tested temperature range and its variation between devices is small, approximately ±3.0%. The advantage of the proposed system compared with similar corona-based constructions is its stable operation at low current with low power consumption and minimum electrode deterioration, which provides a cost effective and reliable solution.