X-ray Reflectivity from Sinusoidal Surface Relief Gratings

• Published in: Crystal research and technology (1979) Vol. 37; no. 7; pp. 770 - 776
• Main Authors: Geue, T., Henneberg, O., Pietsch, U.
• Format: Journal Article
• Language: English
• Published: Berlin WILEY-VCH Verlag Berlin GmbH 01.07.2002; WILEY‐VCH Verlag Berlin GmbH; Wiley-VCH
• Subjects: Applied sciences; Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Organic polymers; Physicochemistry of polymers; Physics; Properties and characterization; reflectivity; relief; Structure of solids and liquids; crystallography; X-ray; X-ray diffraction and scattering; X-ray reflectometry; Patterning; Light irradiation; Physical radiation effects; Theoretical study; X-ray reflection; Experimental study; High-resolution methods; Surface structure; Reflectivity; X-ray scattering; Kinematic theory; Simulation; Polymers; Sinusoidal shape; Relief; Organic compounds
• ISSN: 0232-1300; 1521-4079
• DOI: 10.1002/1521-4079(200207)37:7<770::AID-CRAT770>3.0.CO;2-I

The sinusoidal shape of light‐induced surface relief gratings of polymers can be probed by x‐ray scattering techniques. A particular approach of kinematic x‐ray scattering theory is developed to interpret experimental scattering curves. The simulations demonstrate the particular sensitivity of x‐ray reflectivity for very small grating amplitudes. At angles of incidence close to the critical angle of total external reflection a grating amplitude h < 2 nm already provides measurable grating peaks. In general the grating amplitude h can be measured from the envelope function over the grating peak maxima. The capability of the approach is demonstrated by simulation of the reflection curve recorded from a polymer sample with non uniform grating height.