Material removal mechanism and deformation characteristics of GaN surface at the nanoscale

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Published in	Micro and nanostructures (2022) Vol. 164; p. 107159
Main Authors	Nguyen, Van-Thuc, Fang, Te-Hua
Format	Journal Article
Language	English
Published	01.04.2022
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ArticleNumber	107159
Author	Fang, Te-Hua Nguyen, Van-Thuc
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