Material removal mechanism and deformation characteristics of GaN surface at the nanoscale

Saved in:
Bibliographic Details
Published inMicro and nanostructures (2022) Vol. 164; p. 107159
Main Authors Nguyen, Van-Thuc, Fang, Te-Hua
Format Journal Article
LanguageEnglish
Published 01.04.2022
Online AccessGet full text

Cover

More Information
ISSN:2773-0123
2773-0123
DOI:10.1016/j.spmi.2022.107159