Infinite deflectometry enabling 2π-steradian measurement range

• Published in: Optics express Vol. 27; no. 5; pp. 7602 - 7615
• Main Authors: Graves, L R, Quach, H, Choi, H, Kim, D W
• Format: Journal Article
• Language: English
• Published: United States 04.03.2019
• ISSN: 1094-4087; 1094-4087
• DOI: 10.1364/OE.27.007602

We present a novel deflectometry implementation termed Infinite Deflectometry. The technique provides a full aperture surface reconstruction sag map of freeform surfaces, including previously challenging to measure optics such as highly convex surfaces. The method relies on the creation of a virtual source enclosure around the tested optic, which creates a virtual 2π-steradian measurement range. To demonstrate the performance, a fast f/1.26 convex optical surface was measured with a commercial interferometer and with the Infinite Deflectometry system. After removing Zernike terms 1 through 37, the metrology tests resulted in absolute RMS surface values of 18.48 nm and 16.26 nm, respectively. Additionally, a freeform Alvarez lens was measured with the new technique and measured 22.34 𝜇m of surface sag RMS after piston, tip/tilt, and defocus had been removed. The result deviated by 488 nm RMS from a profilometer measurement while standard interferometry failed to measure the Alvarez lens due to its non-nulled wavefront dynamic range limitation.