Development and characterization of a combinative technique for improving the polishing performance of diamond microarray dresser

• Published in: Diamond and related materials Vol. 29; pp. 69 - 78
• Main Authors: Shih, Ching-Jui, Yeh, Chia-Hung, Lin, Chao-Sung, Pan, Yung-Ning
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.09.2012; Elsevier
• Subjects: Bonding strength; Cross-disciplinary physics: materials science; rheology; Diamond microarray; Disperse; Electroforming; Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; Grit; Materials science; Methods of nanofabrication; Micro-patterning; Nanoscale pattern formation; Nickel; Oxygenated; Physics; Polishing; Specific materials; Surface-modified diamond; Variability; Surface-modified diamond; Diamond microarray; Micro-patterning; Patterning; Diamonds; Mass loss; Polishing; Surface treatments; Interfaces; Manufacturing processes; Composite materials; Chemical treatment; Nickel
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2012.08.004

This paper demonstrates a combinative method composed of a micro-fabrication and nickel electroforming for fabricating a diamond microarray dresser and utilizing a chemical treatment to realize the oxygenated diamond grits embedded into a nickel micro-column. By comparing the current commercial dressers, the diamond microarray not only increases to approximately 35% in the material removal rate, but also maintained a relatively low weight loss in itself. The diamond microarray consists of the regular arrangement micro-columns, which are addressed with oxygenated diamond grits to acquire sufficient bonding strength via smoothing the deposit surrounding the grits derived from the diamond surface modification. This composite diamond/micro-column also provides a high amount of working diamond grits that disperse the impact force on each single diamond grit by micro-fabrication and nickel electroforming to control precisely the uniformity of the distribution and height level of the surface-modified diamond grits. This manufacturing process has the potential to simplify considerably the fabrication and integration of the surface-modified diamond grits on pad dresser-compatible substrates. Consequently, the improvement in the material removal rate and extension of the dresser life are enabled under dressing conditions by a well-patterned micro-column for plowing action at the interface between the polishing pad and oxygenated diamond grits. ► Grinding microarray is fabricated by using micro patterning and electroforming. ► This method controls the uniformity of the distribution and height level of diamonds. ► Microarray increases 35% of the polishing rate and reduces 18% of the weight loss. ► Microarray consists of a micro-column with high amounts of working oxygenated diamond. ► Oxygenated diamond used to acquire sufficient bonding strength via smoothing deposit