Extreme ultraviolet performance of a multilayer coated high density toroidal grating

The performance of a multilayer coated diffraction grating has been evaluated at EUV wavelengths both in terms of absolute efficiency and spectral resolution. The application of a ten-layer Ir/Si multilayer coating to a 3600-lines/mm blazed toroidal replica grating produced a factor of 9 enhancement...

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Bibliographic Details
Published inApplied optics (2004) Vol. 30; no. 16; p. 2245
Main Authors Thomas, R J, Keski-Kuha, R A, Neupert, W M, Condor, C E, Gum, J S
Format Journal Article
LanguageEnglish
Published United States 01.06.1991
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Summary:The performance of a multilayer coated diffraction grating has been evaluated at EUV wavelengths both in terms of absolute efficiency and spectral resolution. The application of a ten-layer Ir/Si multilayer coating to a 3600-lines/mm blazed toroidal replica grating produced a factor of 9 enhancement in peak efficiency near the design wavelength approximately 30 nm in first order, without degrading its excellent quasistigmatic spectral resolution. The measured EUV efficiency peaked at 3.3% and was improved over the full spectral range between 25 and 35 nm compared with the premultilayer replica which had a standard gold coating. In addition, the grating's spectral resolution of >5000 was maintained.
ISSN:1559-128X
DOI:10.1364/AO.30.002245