Full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers

We developed a full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers. The Wolter mirrors for a condenser and an objective were fabricated using an electroforming process with a precisely figured master mandrel. In the imaging system constructed at SACLA BL1, sub-micromet...

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Bibliographic Details
Published inOptics express Vol. 27; no. 23; pp. 33889 - 33897
Main Authors Egawa, Satoru, Owada, Shigeki, Motoyama, Hiroto, Yamaguchi, Gota, Matsuzawa, Yusuke, Kume, Takehiro, Kubota, Yuya, Tono, Kensuke, Yabashi, Makina, Ohashi, Haruhiko, Mimura, Hidekazu
Format Journal Article
LanguageEnglish
Published United States 11.11.2019
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Summary:We developed a full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers. The Wolter mirrors for a condenser and an objective were fabricated using an electroforming process with a precisely figured master mandrel. In the imaging system constructed at SACLA BL1, sub-micrometer spatial resolution was achieved at wavelengths of 10.3 and 3.4 nm. Single-shot bright-field images were acquired with a maximum illumination intensity of 7×10 W/cm .
Bibliography:ObjectType-Article-1
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.27.033889