Enhancing one dimensional sensitivity with plasmonic coupling

In this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use of the interaction between slight changes in refractive index and localized plasmons, we demonstrate sub-angstrom scale sensitivity in this...

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Published inOptics express Vol. 22; no. 21; pp. 26246 - 26253
Main Authors O'Mullane, Samuel, Peterson, Brennan, Race, Joseph, Keller, Nick, Diebold, Alain C
Format Journal Article
LanguageEnglish
Published United States 20.10.2014
Subjects
Biopolymers - analysis
Biosensing Techniques - instrumentation
Equipment Design
Nanostructures - chemistry
Nanotechnology - instrumentation
Refractometry - instrumentation
Surface Plasmon Resonance - instrumentation
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Summary:In this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use of the interaction between slight changes in refractive index and localized plasmons, we demonstrate sub-angstrom scale sensitivity in this structure. Compared to unaltered infinite metal gratings and truncated finite gratings, this cross-grating structure shows robust spectra dependent mostly on the dimension of the smaller line width and pitch. While typical scatterometry simulations show angstrom resolution at best, this structure has demonstrated picometer resolution. Due to the wide range of acceptable specifications, we expect experimental confirmation of such structures to soon follow.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.22.026246