Local Measurement and Computational Refinement of Aberrations for HRTEM

• Published in: Microscopy and microanalysis Vol. 12; no. 6; pp. 461 - 468
• Main Authors: Kirkland, Angus I., Meyer, Rüdiger R., Chang, Lan-Yun Shery
• Format: Journal Article
• Language: English
• Published: New York, USA Cambridge University Press 01.12.2006; Oxford University Press
• Subjects: Accuracy; Methods; Transmission electron microscopy; aberration measurement; high resolution electron microscopy

Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination i...