Local Measurement and Computational Refinement of Aberrations for HRTEM

Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination i...

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Published inMicroscopy and microanalysis Vol. 12; no. 6; pp. 461 - 468
Main Authors Kirkland, Angus I., Meyer, Rüdiger R., Chang, Lan-Yun Shery
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.12.2006
Oxford University Press
Subjects
Accuracy
Methods
Transmission electron microscopy
aberration measurement
high resolution electron microscopy
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Summary:Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927606060612