High sensitivity ozone sensors for environmental monitoring produced using laser ablated nanocrystalline metal oxides

A series of gas sensors produced using the laser ablated nanocrystalline metal oxides. SnO/sub 2/, In/sub 2/O/sub 3/, and WO/sub 3/ have been studied. Devices were tested with a view to their potential use as ozone detectors. Initially, fabrication procedures and compositions were optimized. The inv...

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Bibliographic Details
Published inIEEE sensors journal Vol. 2; no. 1; pp. 14 - 19
Main Authors Starke, T.K.H., Coles, G.S.V.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.02.2002
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Delay
Devices
Environmental monitoring
Gas detectors
Gas lasers
Gases
Lasers
Metal oxides
Monitoring
Nanocrystals
Optical materials
Ozone
Production
Semiconductor materials
Tin
Tin dioxide
Tin oxides
Tungsten oxides
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Summary:A series of gas sensors produced using the laser ablated nanocrystalline metal oxides. SnO/sub 2/, In/sub 2/O/sub 3/, and WO/sub 3/ have been studied. Devices were tested with a view to their potential use as ozone detectors. Initially, fabrication procedures and compositions were optimized. The investigation then focused on parameters important for environmental monitoring applications including sensitivity, selectivity, and response time. High sensitivities to ppb ozone levels were observed particularly in the case of devices produced using SnO/sub 2/ and In/sub 2/O/sub 3/. Good selectivity was also observed for all optimized materials together with fast response times. These latter characteristics were particularly good for devices produced using WO/sub 3/.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1530-437X
1558-1748
DOI:10.1109/7361.987056