Explosive micro-bubble actuator

Explosive evaporation occurs when a liquid is exposed to extremely high heat-fluxes. Within a few microseconds a bubble in the form vapour film is generated, followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in curren...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 145-146; pp. 387 - 393
Main Authors van den Broek, D.M., Elwenspoek, M.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.07.2008
Subjects
Explosive evaporation
Micro-bubble actuator
Micro-bubble actuator
Explosive evaporation
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Summary:Explosive evaporation occurs when a liquid is exposed to extremely high heat-fluxes. Within a few microseconds a bubble in the form vapour film is generated, followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. Here it will be utilised to deflect a 1μm thick low-stress silicon-nitride membrane. Bubble nucleation and growth are studied with stroboscopic microscopy and membrane deflection is measured with a laservibrometer. Within a few microseconds the bubbles can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.
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ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2007.11.008