Recent developments and future perspectives in 3D silicon radiation sensors

In this paper we report on the most recent achievements of the ATLAS 3D Sensors Collaboration in the development of silicon 3D sensors. Results from 3D pixels production for the ATLAS Insertable B-Layer (IBL) are presented, showing the high quality and good process reproducibility of the technology....

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Bibliographic Details
Published inJournal of instrumentation Vol. 7; no. 10; pp. 1 - 6
Main Authors Betta, G-FD, Da Via, C, Povoli, M, Parker, S, Boscardin, M, Darbo, G, Grinstein, S, Grenier, P, Hasi, J, Kenney, C, Kok, A, Lai, C-H, Pellegrinii, G, Watts, S
Format Journal Article
LanguageEnglish
Published 01.10.2012
Subjects
Detectors
Instrumentation
Pixels
Reproducibility
Sensors
Silicon
Three dimensional
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Summary:In this paper we report on the most recent achievements of the ATLAS 3D Sensors Collaboration in the development of silicon 3D sensors. Results from 3D pixels production for the ATLAS Insertable B-Layer (IBL) are presented, showing the high quality and good process reproducibility of the technology. In view of the future detector upgrades at the LHC, a new generation of 3D pixel sensors will be developed. This will require some new ideas and the solution of technological challenges. Both will briefly be addressed in this paper.
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ISSN:1748-0221
1748-0221
DOI:10.1088/1748-0221/7/10/C10006