Appling of New Optical Measurement and Theory in Mechanical Properties of Thin Film
The thesis aims to characterize the mechanical properties and stresses for thin films deposited on the circular substrates. First, the thin films with the same deposition condition were successively deposited on the distinct substrates using the evaporation technique. The phase-shifting Twyman-Green...
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Published in | Applied Mechanics and Materials Vol. 121-126; pp. 4295 - 4299 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Zurich
Trans Tech Publications Ltd
01.01.2012
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Subjects | |
Online Access | Get full text |
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Summary: | The thesis aims to characterize the mechanical properties and stresses for thin films deposited on the circular substrates. First, the thin films with the same deposition condition were successively deposited on the distinct substrates using the evaporation technique. The phase-shifting Twyman-Green interferometer (PSTGI) was then employed to measure the warpage of the film-substrate structures and therefore the intrinsic stresses and thermal stresses can be calculated from the well-known Stoney’s formula. The coefficients of thermal expansion (CTE) and Young’s modulus of thin films were also obtained from the Stoney’s theory. Furthermore, the merit of full-field character of optical interferometry was used to propose a novel methodology using the Chen and Ou’s theory to improve the accuracy and to reduce the experiment procedures in the traditional measurement of the aforementioned mechanical properties. Finally, the measured results corresponding to the traditional and proposed methods were respectively substituted into their adopted theories to compare their difference. The results reveal that the accuracy of proposed methodology is considerably improved and the experimental procedures are reduced to those of the traditional methods. |
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Bibliography: | Selected, peer reviewed papers from the Second International Conference on Frontiers of Manufacturing and Design Science, (ICFMD 2011), December 11-13, Taiwan |
ISBN: | 3037852828 9783037852828 |
ISSN: | 1660-9336 1662-7482 1662-7482 |
DOI: | 10.4028/www.scientific.net/AMM.121-126.4295 |