Fabrication and Characterization of Polymer-Bonded Flexible Anisotropic Micro-Magnet Arrays
Here, we present a process for the fabrication of arrays of anisotropic flexible bonded micro-magnets attached to a transparent base. The micro-magnets are based on hard magnetic SmFeN or Sr-ferrite powders mixed with polydimethylsiloxane (PDMS). The size, shape, and distribution of the micro-magnet...
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Published in | IEEE transactions on magnetics Vol. 58; no. 2; pp. 1 - 5 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.02.2022
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Institute of Electrical and Electronics Engineers |
Subjects | |
Online Access | Get full text |
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Summary: | Here, we present a process for the fabrication of arrays of anisotropic flexible bonded micro-magnets attached to a transparent base. The micro-magnets are based on hard magnetic SmFeN or Sr-ferrite powders mixed with polydimethylsiloxane (PDMS). The size, shape, and distribution of the micro-magnets are defined using a Si-mold fabricated by deep reactive ion etching (DRIE). The volume fraction of the magnetic powder was fixed at 30% while the thickness of the micro-magnets ranged from 50 to <inline-formula> <tex-math notation="LaTeX">300~\mu \text{m} </tex-math></inline-formula> and their in-plane dimensions from 20 to <inline-formula> <tex-math notation="LaTeX">400~\mu \text{m} </tex-math></inline-formula>. Powder alignment was achieved using a bulk NdFeB magnet. Arrays of micro-pillars of height <inline-formula> <tex-math notation="LaTeX">300~\mu \text{m} </tex-math></inline-formula> and width tapering from <inline-formula> <tex-math notation="LaTeX">300~\mu \text{m} </tex-math></inline-formula> at their base to <inline-formula> <tex-math notation="LaTeX">200~\mu \text{m} </tex-math></inline-formula> at their top were characterized using a vibrating sample magnetometer (VSM) and a scanning Hall probe microscope (SHPM) and the results of the latter were compared with analytical simulations. The homogeneous magnetic field produced by a three-axis electromagnet was used to move the micro-pillars in a controlled fashion. The field induced in-plane displacement of the SmFeN-based pillars was more than three times greater than that of the Sr-ferrite-based ones, reaching <inline-formula> <tex-math notation="LaTeX">13~\mu \text{m} </tex-math></inline-formula> at the maximum applied field value of 100 mT. |
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ISSN: | 0018-9464 1941-0069 |
DOI: | 10.1109/TMAG.2021.3088048 |