Ion beam mixing and radiation enhanced diffusion in metal/ceramic interfaces

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 106; no. 1; pp. 589 - 596
• Main Authors: Neubeck, K., Lefaucheur, C.-E., Hahn, H., Balogh, A.G., Baumann, H., Bethge, K., Rück, D.M.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.12.1995
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/0168-583X(95)00815-2

Ion beam techniques are frequently used to modify the physical properties of materials. It is the aim of this contribution to obtain information on ion beam effects on irradiated metal/ceramic interfaces with bilayer geometry. Ion beam mixing and radiation enhanced diffusion have been investigated in Cu Al 2O 3 , Au Al 2O 3 and Au ZrO 2 samples. Specimen, with thicknesses of the metallic film in the range of 60–70 nm, were prepared by vapor deposition and irradiated with 150 keV Ar + ions in the range of 0.9 × 10 16 to 1.5 × 10 17 Ar +/cm 2. Sample temperature during irradiation was varied between 77 K and 673 K. The mixing behaviour was analysed using concentration depth profiles measured by Rutherford Backscattering Spectroscopy (RBS). The results show that mixing efficiencies for all elements scale linear by the Ar + ion dose. Radiation enhanced diffusion is separated from temperature independent mixing processes. High resolution scanning electron microscopy (HREM) showed strong surface deterioration for the Au Al 2O 3 and Au ZrO 2 samples. X-Ray Photoelectron Spectroscopy (XPS) analysis in the particular case of the Cu Al 2O 3 interface was performed.