Fabrication of GaN films through reactive reconstruction of magnetron sputtered ZnO/Ga2O3

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Bibliographic Details
Published inJournal of Central South University of Technology. Science & technology of mining and metallurgy Vol. 12; no. 1; pp. 9 - 12
Main Authors Gao, Hai-yong, Zhuang, Hui-zhao, Xue, Chen-shan, Dong, Zhi-hua, He, Jian-ting, Liu, Yi-an, Wu, Yu-xin, Tian, De-heng
Format Journal Article
LanguageEnglish
Published 01.02.2005
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ISSN:1005-9784
1993-0666
DOI:10.1007/s11771-005-0192-9