Influence of Crystalline Defects and Residual Stress on the Electrical Characteristics of SOS MOS Devices

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 17; no. 2; pp. 413 - 422
Main Authors Onga, Shinji, Hatanaka, Katsunori, Kawaji, Shinji, Yasuda, Yukio
Format Journal Article
LanguageEnglish
Published 01.01.1978
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.17.413