Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment
In this paper we discuss two techniques to optimize the quality of multilayer x-ray mirrors, namely optimization of the temperature of the substrates during deposition and ion-bombardment of the layers. We produced Mo/Si multilayers applying both methods and present the effect on the near normal inc...
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Published in | Microelectronic engineering Vol. 23; no. 1; pp. 215 - 218 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
1994
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Online Access | Get full text |
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Summary: | In this paper we discuss two techniques to optimize the quality of multilayer x-ray mirrors, namely optimization of the temperature of the substrates during deposition and ion-bombardment of the layers. We produced Mo/Si multilayers applying both methods and present the effect on the near normal incidence reflectivity for
λ = 13–14
nm radiation. Furthermore an analysis of the homogeneity of the deposited layers is given. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/0167-9317(94)90140-6 |