Printed, short-channel, top-gate carbon nanotube thin-film transistors on flexible plastic film

We fabricated sub-10-µm-class short-channel, top-gate carbon nanotube thin-film transistors using a flexographic printing technique, which is a high-speed printing technique that uses a flexible polymer plate. This device fabrication process is completely photolithography-free and vacuum-free as a r...

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Bibliographic Details
Published inApplied physics express Vol. 8; no. 4; pp. 45102 - 45105
Main Authors Maeda, Michihiko, Hirotani, Jun, Matsui, Ryotaro, Higuchi, Kentaro, Kishimoto, Shigeru, Tomura, Takuya, Takesue, Masafumi, Hata, Katsuhiko, Ohno, Yutaka
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.04.2015
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Summary:We fabricated sub-10-µm-class short-channel, top-gate carbon nanotube thin-film transistors using a flexographic printing technique, which is a high-speed printing technique that uses a flexible polymer plate. This device fabrication process is completely photolithography-free and vacuum-free as a result of the printing technique. The printing resolution was improved by using micro-flexo plates fabricated by a microprocessing technique. The fabricated device, with a channel length of 9.5 µm, exhibited a high on-current of 0.94 mA/mm. Hysteresis was suppressed by introducing a top-gate structure.
ISSN:1882-0778
1882-0786
DOI:10.7567/APEX.8.045102