Effects of the binder material on the mechanical properties of thick-film magnetostrictive materials

This paper presents research carried out at the University of Southampton into the development of a magnetostrictive thick-film material suitable for use with silicon micromachined devices. This form of magnetostrictive material has previously been deposited onto alumina substrates and this paper re...

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Published inSensors and actuators. A. Physical. Vol. 110; no. 1; pp. 365 - 370
Main Authors Grabham, N.J., Beeby, S.P., White, N.M.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.02.2004
Subjects
Magnetostrictive
MEMS
Thick film
Thick film
Magnetostrictive
MEMS
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Summary:This paper presents research carried out at the University of Southampton into the development of a magnetostrictive thick-film material suitable for use with silicon micromachined devices. This form of magnetostrictive material has previously been deposited onto alumina substrates and this paper reports further work on migrating the technology onto silicon. The evaluation of two alternative glass frits for use as the binder within the thick film is reported. The correct choice of the binder material is important in a thick-film material because it is responsible for binding the active material within the thick film into a composite material and also adhering the film to the substrate. A series of tests have been applied to samples fabricated using various glass frits to assess their mechanical properties and suitability for the micro-actuator applications.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2003.09.005