The Lund Nuclear Microprobe sub-micron set-up. Part I: Ion optics calculation
A new beam line for generating a sub-micron beam spot for high-resolution nuclear microprobe applications has been constructed at the Lund nuclear microprobe facility. In this paper, the first in a series of three, a detailed theoretical investigation of different focusing systems is presented based...
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Published in | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 231; no. 1-4; pp. 1 - 6 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.04.2005
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Subjects | |
Online Access | Get full text |
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Summary: | A new beam line for generating a sub-micron beam spot for high-resolution nuclear microprobe applications has been constructed at the Lund nuclear microprobe facility. In this paper, the first in a series of three, a detailed theoretical investigation of different focusing systems is presented based on calculations performed with the computer programs PRAM and OXTRACE. Comparison is made between a doublet, a triplet, a quadruplet and a split quadruplet (two-stage focusing). For the split quadruplet all four quadrupole magnets were uncoupled.
The conclusion from the calculations was that to obtain the smallest possible beam, the two-stage focusing system should be used. Such a focusing system (a doublet at each stage) has been chosen for the new sub-micron set-up at the Lund NMP laboratory. The first stage focuses the beam in an intermediate chamber, which has a high-resolution optical viewing system facilitating more control over the beam spot. This real image of the first stage is then used as a virtual object for the second stage. |
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ISSN: | 0168-583X 1872-9584 |
DOI: | 10.1016/j.nimb.2005.01.026 |