Indium fluoride thin films prepared by sublimation under vacuum

Thin films of indium fluoride were obtained by sublimation under vacuum of high purity powders. Their crystallographic state and composition, as a function of the preparation conditions, were investigated by X-ray diffraction, Rutherford backscattering of α particles, mass spectrometry and photoelec...

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Bibliographic Details
Published inThin solid films Vol. 209; no. 1; pp. 38 - 43
Main Authors Barrière, A.S., Couturier, G., Elfajri, A., Gevers, G., Guégan, H., Mombelli, B., Tournay, V.
Format Journal Article
LanguageEnglish
Published Lausanne Elsevier B.V 15.03.1992
Elsevier Science
Elsevier
Subjects
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physical properties of thin films, nonelectronic
Physics
Solid surfaces and solid-solid interfaces
Surface energy; thermodynamic properties
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Energy gap
Indium Fluorides
Rutherford backscattering
Preparation
Sublimation
Chemical composition
Experimental study
X ray diffraction
Mass spectrometry
Optical absorption
Inorganic compound
Thin film
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Summary:Thin films of indium fluoride were obtained by sublimation under vacuum of high purity powders. Their crystallographic state and composition, as a function of the preparation conditions, were investigated by X-ray diffraction, Rutherford backscattering of α particles, mass spectrometry and photoelectron spectroscopy. The energy band gap of the obtained layers and their electrical characteristics were respectively deduced from optical absorption measurements and admittance spectroscopy.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(92)90007-X