Room temperature pulsed laser deposited ZnO thin films as photoluminiscence gas sensors

• Published in: Applied surface science Vol. 259; pp. 806 - 810
• Main Authors: Padilla-Rueda, D., Vadillo, J.M., Laserna, J.J.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.10.2012; Elsevier
• Subjects: Concentration (composition); Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Fluorescence; Glass; Lasers; Morphology; Nitrogen dioxide; Opto-sensor NO2; Physics; PLD; Pulsed laser deposition; Room temperature films; Thin films; Zinc oxide; ZnO film; ZnO film; PLD; Pulsed laser deposition; Room temperature films; Opto-sensor NO2; Thin films; Inorganic compounds; Opto-sensor NO; Measurement sensor; Transition element compounds; Zinc oxide; Pulsed lasers; Film growth
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2012.07.128

[Display omitted] ► Elaboration of functional ZnO thin films by PLD at room temperature is possible. ► Fluorescence quenching of ZnO thin films may be used for NO2 sensors. ► Addition of oxygen during deposition is required to get films of better quality. ► Films exhibited linear behaviour in the range between 26 and 100ppm. Zinc oxide thin films with optical sensing capabilities for NO2 have been elaborated by pulsed laser deposition (PLD) onto glass substrates at room temperature with Nd:YAG laser (1064nm). Morphology, chemical composition and optical characteristics of the films were evaluated as a function of laser fluence, gas pressure and target-to-substrate distance. Films exhibit excellent morphological and optical (transmittance and photoluminescence) properties. The films have been evaluated as fluorescence sensors for NO2 in the concentration range between 26 and 200ppm.