Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation

• Published in: Applied physics. A, Materials science & processing Vol. 86; no. 4; pp. 491 - 495
• Main Authors: WU, X. J, JIA, T. Q, ZHAO, F. L, HUANG, M, XU, N. S, KURODA, H, XU, Z. Z
• Format: Journal Article
• Language: English
• Published: Berlin Springer 01.03.2007; Springer Nature B.V
• Subjects: Applied physics; Circular polarization; Cross-disciplinary physics: materials science; rheology; Crystal surfaces; Exact sciences and technology; Femtosecond pulses; Laser ablation; Laser arrays; Laser-assisted deposition; Lasers; Linear polarization; Materials science; Methods of nanofabrication; Nanoparticles; Nanopowders; Nanoscale materials and structures: fabrication and characterization; Physics; Second harmonic generation; Silicon carbide; Nanoparticles; Second harmonic generation; Laser pulse; Amorphous hydrogenated material; Morphology; Silicon carbides; Pulsed laser deposition; Laser irradiation; Nanostructures; Microstructure; Formation mechanism; Periodic structures
• ISSN: 0947-8396; 1432-0630
• DOI: 10.1007/s00339-006-3797-4

Uniform arrays of periodic nanoparticles with 80-nm period are formed on 6H-SiC crystal irradiated by circularly polarized 400-nm femtosecond laser pulses. In order to understand the formation mechanism, the morphology evolvement as a function of laser pulse energy and number is studied. Periodic nanoripples are also formed on the sample surface irradiated by linearly polarized 400-, 510- and 800-nm femtosecond laser pulses. All these results support well the mechanism that second-harmonic generation plays an important role in the formation of periodic nanostructures.