Design and characterisation of a compact 4-degree-of-freedom fast steering mirror system based on double Porro prisms for laser beam stabilization

• Published in: Sensors and actuators. A. Physical. Vol. 322; p. 112639
• Main Authors: Chang, Yu-Hao, Hao, Guangbo, Liu, Chien-Sheng
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 01.05.2021; Elsevier BV
• Subjects: 4 degree-of-freedom actuator; Actuators; Degrees of freedom; Dissection; Electromagnetics; Fast steer mirror; Finite element analysis; Finite element method; Flexure structure; Laser beam stabilization; Laser beams; Laser stability; Lasers; Mathematical analysis; Mechanical properties; Prisms; Steering; Studies; Voice coil motor; Fast steer mirror; 4 degree-of-freedom actuator; Voice coil motor; Flexure structure; Laser beam stabilization
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2021.112639

Design a new compact 4-DOF actuator to implement the idea of fast steer mirror (FSM) based on double Porro prisms and integrate the proposed FSM compensation system of our previous study. [Display omitted] •Propose a 4-degree-of-freedom (DOF) actuator to integrate the proposed fast steer mirror (FSM) compensation system.•Design and analyze the characteristics of the electromagnetic structure and mechanical structure for the proposed 4-DOF FSM.•Verify the laser error compensation of proposed 4-DOF FSM by using a laboratory-built prototype. This paper proposes a 4-degree-of-freedom (DOF) actuator for a fast steer mirror (FSM) compensation system in order to compensate for 4-DOF laser errors. The mathematic system modeling was built to design and predict the performance of the proposed 4-DOF FSM. Finite element analysis was performed by using a commercial software to analyze the characteristics of the electromagnetic structure and mechanical structure for the proposed 4-DOF FSM. This study further verifies the properties of the proposed 4-DOF FSM by using a laboratory-built prototype. The proposed 4-DOF FSM has the travel range of ±5 mrad and ±0.04 mm along X and Y axes with accuracy of 0.025 mrad and 0.0012 mm and the bandwidth of rotational part and translational part are 10 Hz and 39 Hz, respectively.