Sputtering: the material erosion tool

The erosion of materials with energetic ions is an indispensable tool in the laboratory and the industry. The ion–solid collision process leading to the ejection of atoms contains fascinating physics and materials science of surfaces. In this article, different aspects of sputtering relevant to appl...

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Bibliographic Details
Published inSurface science Vol. 500; no. 1-3; pp. 523 - 544
Main Author Murty, M.V.Ramana
Format Journal Article
LanguageEnglish
Published Lausanne Elsevier B.V 10.03.2002
Amsterdam Elsevier Science
New York, NY
Subjects
Cross-disciplinary physics: materials science; rheology
Deposition by sputtering
Exact sciences and technology
Ion etching
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Secondary ion mass spectroscopy
Sputter deposition
Sputtering
Surface structure, morphology, roughness, and topography
Ion etching
Surface structure, morphology, roughness, and topography
Sputter deposition
Secondary ion mass spectroscopy
Sputtering
Secondary ion mass spectrometry
Reviews
Surface topography
Ion-surface impact
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Summary:The erosion of materials with energetic ions is an indispensable tool in the laboratory and the industry. The ion–solid collision process leading to the ejection of atoms contains fascinating physics and materials science of surfaces. In this article, different aspects of sputtering relevant to applications are discussed. Current research is emphasized and future directions are outlined.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0039-6028
1879-2758
DOI:10.1016/S0039-6028(01)01586-2