Reliability of Ferroelectric Multilayer PZT Thick Films Fabricated by Aerosol Deposition

Multilayer PZT thick film (∼10 μm) on Ti-metal substrate fabricated by aerosol deposition (AD) with LaNiO 3 (LNO) top and bottom electrode and investigated their dielectric and ferroelectric properties. The film was found to be highly dense and crack free. The ferroelectric fatigue up to 10 9 bipola...

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Bibliographic Details
Published inFerroelectrics Vol. 470; no. 1; pp. 183 - 193
Main Authors Kambale, Rahul C., Han, Guifang, Yoon, Woon-Ha, Kim, Jong-Woo, Choi, Jong-Jin, Hahn, Byung-Dong, Park, Dong-Soo, Ahn, Cheol-Woo, Ryu, Jungho
Format Journal Article
LanguageEnglish
Published Philadelphia Taylor & Francis 03.10.2014
Taylor & Francis Ltd
Subjects
aerosol-deposition
Aerosols
Deposition
Dielectric properties
ferroelectric fatigue
Ferroelectric materials
Ferroelectricity
Ferroelectrics
LaNiO
Lead zirconate titanates
Materials fatigue
multilayer thick film
Multilayers
Particle physics
Polymer films
PZT
Temperature effects
Thick films
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Summary:Multilayer PZT thick film (∼10 μm) on Ti-metal substrate fabricated by aerosol deposition (AD) with LaNiO 3 (LNO) top and bottom electrode and investigated their dielectric and ferroelectric properties. The film was found to be highly dense and crack free. The ferroelectric fatigue up to 10 9 bipolar switching cycles as well as the thermal shock (−30°C and 90°C) with 30 cycles test revealed no significant change in the remnant polarization, dielectric constant and dielectric loss was observed which shows the reliability of AD film. The temperature dependent dielectric and ferroelectric properties of PZT thick films were discussed in this paper.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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ISSN:0015-0193
1563-5112
DOI:10.1080/00150193.2014.923253