Stressed-metal NiZr probes for atomic force microscopy

Stressed-metal beams have recently been introduced as probes for high-topography substrates in atomic force microscopy (AFM). Their low spring constant and the adhesive-based probe mounting did, however, not allow for good non-contact measurements. Furthermore, the probe material was restricted to M...

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Bibliographic Details
Published inMicroelectronic engineering Vol. 67; pp. 803 - 809
Main Authors Hantschel, T., Chow, E.M., Rudolph, D., Shih, C., Wong, L., Fork, D.K.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier B.V 01.06.2003
Elsevier Science
Subjects
AFM
Atomic force microscopes
Clamp
Exact sciences and technology
Holder
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Scanning probe
Scanning probe microscopes, components and techniques
Stressed-metal
Tip
AFM
Clamp
Tip
Stressed-metal
Scanning probe
Holder
Atomic force microscopy
Wear
Telemetry
High-resolution methods
Non contact measurement
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Summary:Stressed-metal beams have recently been introduced as probes for high-topography substrates in atomic force microscopy (AFM). Their low spring constant and the adhesive-based probe mounting did, however, not allow for good non-contact measurements. Furthermore, the probe material was restricted to MoCr. Therefore, we have developed stiffer NiZr probes for non-contact mode measurements. Our clamp holder enables rigid mounting and easy exchange of stressed probes in commercial AFM systems. This paper presents NiZr probes and a clamp holder concept. High-resolution measurements and low tip wear are demonstrated.
Bibliography:SourceType-Scholarly Journals-2
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ObjectType-Conference Paper-1
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SourceType-Conference Papers & Proceedings-1
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ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(03)00142-4