Orientation selection in functional oxide thin films
Mechanisms for orientation selection in complex oxide thin films are discussed, focusing on two examples: (1) development of a preferential texture in sol-gel prepared polycrystalline PZT films on Pt electrode layers and (2) selection of oxides for epitaxial growth on Si (111) and (100). In sol-gel...
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Published in | Journal of the European Ceramic Society Vol. 24; no. 6; pp. 969 - 974 |
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Main Authors | , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Oxford
Elsevier Ltd
2004
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | Mechanisms for orientation selection in complex oxide thin films are discussed, focusing on two examples: (1) development of a preferential texture in sol-gel prepared polycrystalline PZT films on Pt electrode layers and (2) selection of oxides for epitaxial growth on Si (111) and (100). In sol-gel PZT, a direct link was found between the formation of a well crystallized transient fluorite phase, promoted by reducing pyrolysis conditions, and the emergence of a strongly preferred (111) texture after crystallization. Meanwhile, in the MBE growth of epitaxial oxides on silicon, matching of silicon and oxide surface lattices is not a sufficient condition to achieve layer-by-layer growth, needed for planar films. In fact, for planar growth on Si(111), fluorite-structure compounds are required, while rocksalt and perovskite structure oxides are suited for the growth of low-roughness films on Si(100). These examples illustrate the important role played by surface energy in orientation selection. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0955-2219 1873-619X |
DOI: | 10.1016/S0955-2219(03)00405-9 |