Improving sensing properties of entangled carbon nanotube-based gas sensors by atmospheric plasma surface treatment
Entangled multi-walled carbon nanotubes (MWCNTs) on polyurethane (PUR) after Ar plasma-treatment and He plasma-treatment have been tested as gas sensors for ethanol sensing. It was found that plasma-treated sensors exhibit higher sensitivity compared to the non-treated samples along with different e...
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Published in | Microelectronic engineering Vol. 232; p. 111403 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier B.V
15.08.2020
Elsevier BV |
Subjects | |
Online Access | Get full text |
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Summary: | Entangled multi-walled carbon nanotubes (MWCNTs) on polyurethane (PUR) after Ar plasma-treatment and He plasma-treatment have been tested as gas sensors for ethanol sensing. It was found that plasma-treated sensors exhibit higher sensitivity compared to the non-treated samples along with different ethanol concentration. Non-treated sensors exhibit similar sensor response with the increase in ethanol concentration, while Ar plasma-treated sensors displays ~5 times improvement and He plasma-treated sensors show ~3 times improvement with an increase in ethanol concentration. The sensitivity of the plasma-treated sensors is also stable for following two-weeks after the preparation compared to the non-treated sensor. Entangled nanotube network exhibits a significant shift in the baseline resistance after both plasma-treatments. The response time of the sensor was increased after the plasma-treatment, while the recovery was rather quick. Surface analyses revealed that plasma-treatment did not make any significant morphological changes. Thus, the improvements in stability and sensitivity after plasma-treatment are attributed to the plasma-enhanced surface modification and formation of functional bonds on the surface of nanotubes, which are sensitive to the ethanol vapour.
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•Sensing properties of the entangled carbon nanotube-based sensors were improved by atmospheric jet plasma surface treatment.•Plasma surface-treatment resulted in a significant shift in the baseline resistance and enhancement of stability of the sensors.•Influence of plasma-treatment on the sensor response and recovery time at room temperature was investigated. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2020.111403 |