Nano Hardness and Elastic Modulus of Nanocrystalline Diamond Coating

• Published in: Integrated ferroelectrics Vol. 152; no. 1; pp. 152 - 157
• Main Authors: Wenzhuang, Lu, Wei, Feng, Han, Wang, Jun, Xu, Qunchao, Huang, Min, Zhang, Dun-Wen, Zuo
• Format: Journal Article
• Language: English
• Published: Philadelphia Taylor & Francis 24.03.2014; Taylor & Francis Ltd
• Subjects: Coatings; Diamonds; Elastic modulus; Filaments; Grain size; Hardness; Modulus of elasticity; nano hardness; nano indentation; Nanocrystals; Nanostructure; NCD coating; Substrates; Temperature; Thin film coatings
• ISSN: 1058-4587; 1607-8489
• DOI: 10.1080/10584587.2014.902265

Nanocrystalline diamond (NCD) coatings were prepared on Si 3 N 4 substrate by hot filament chemical vapor deposition (HFCVD) method with Ar/H 2 /CH 4 gas mixture. The nano hardness and elastic modulus of the NCD coatings were evaluated using a nano indenter. The results show that the diamond grains appear to be rounded with the average grain size of less than 100 nm. The average nano hardness is ∼53.5 GPa, the elastic modulus is ∼606.8 GPa, and the elastic recovery is as high as ∼80%, for the fine NCD coatings deposited with the substrate temperature of 700°C. The nano hardness and elastic modulus of the NCD coatings will increase with the substrate temperature increasing from 600°C to 700°C.