Hydrogenation of Silicon Tetrachloride in Microwave Plasma

• Published in: Chinese journal of chemical engineering Vol. 22; no. 2; pp. 227 - 233
• Main Author: 占振西 张伟刚
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.02.2014
• Subjects: Chemical engineering; Conversion ratio; Energy management; equilibrium constant; Hydrogenation; Mathematical models; Microwave plasmas; non-thermodynamic equilibrium plasma; Optimization; plasma temperature; Silicon tetrachloride; 四氯化硅; 平衡常数; 微波等离子体; 摩尔比; 氢化; 特征温度; 转化率; 非热平衡; silicon tetrachloride; equilibrium constant; hydrogenation; non-thermodynamic equilibrium plasma; plasma temperature
• ISSN: 1004-9541; 2210-321X
• DOI: 10.1016/S1004-9541(14)60025-2

This study investigated the hydrogenation of silicon tetrachloride （SIC14） in microwave plasma. A new launcher of argon （Ar） and hydrogen （Ha） plasma was introduced to produce a non-thermodynamic equilibrium activation plasma. The plasma state exhibited a characteristic temperature related to the equilibrium constant, which was termed ＂Reactive Temperature＂ in this study. Thus, the hydrogenation of SIC14 in the plasma could easily be handled with high conversion ratio and very high selectivity to trichlorosilane （SiHC13）. The effects of SiC14/Ar and H2/Ar ratios on the conversion were also investigated using a mathematical model developed to determine the op- timum experimental parameters. The highest hydrogenation conversion ratio was produced at a H2/SiCl4 molar ratio of 1, with mixtures of SICl4 and H2 to Ar molar ratio of 1.2 to 1.4. In this plasma, the special system pressure and incident power were required for the highest energy efficiency of hydrogenating SIC14, while the optimum system pressure varies from 26.6 to 40 kPa depending on input power, and the optimum feed gas （He and SiCI4） molar en- ergy input was about 350 kJ. mo1-1.