Atomic layer deposition in porous structures: 3D photonic crystals

• Published in: Applied surface science Vol. 244; no. 1; pp. 511 - 516
• Main Authors: King, J.S., Heineman, D., Graugnard, E., Summers, C.J.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 15.05.2005; Elsevier Science
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Optical materials; Optical microcavities; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optics; Photoluminescence; Photonic band gap properties; Photonic bandgap materials; Physics; Three-dimensional photonic crystals; Three-dimensional photonic crystals; Photonic band gap properties; Optical microcavities; Photoluminescence; Scanning electron microscopy; Zinc sulfides; Atomic layer method; Inorganic compounds; Photonic band gap; Porous materials; Three-dimensional systems; Transition element compounds; Photonic crystals; Titanium oxides; Reflection spectrum; Infiltration; Crystal structure

This paper reports recent results from studies of atomic layer deposition for the infiltration of three-dimensional photonic crystals. Infiltration of ZnS:Mn and TiO 2 are reported for SiO 2-based opal templates. It has been demonstrated that high filling fractions can be achieved and that the infil...