Reproducibility and stability of N-Al codoped p-type ZnO thin films

• Published in: Journal of materials science Vol. 41; no. 2; pp. 467 - 470
• Main Authors: LU, J. G, ZHU, L. P, YE, Z. Z, ZHUGE, F, ZHAO, B. H, MA, D. W, WANG, L, HUANG, J. Y
• Format: Journal Article
• Language: English
• Published: Heidelberg Springer 2006; Springer Nature B.V
• Subjects: Acceptability; Carrier density; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Crystallinity; Defects and impurities: doping, implantation, distribution, concentration, etc; Diffraction; Electrical properties of specific thin films; Electron mobility; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Exact sciences and technology; Hall effect; Halls; Ii-vi semiconductors; Materials science; Optical properties; Physics; Reproducibility; Secondary ion mass spectroscopy; Stability; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Thin films; Zinc oxide; Inorganic compounds; Stability; Electrical properties; Doping; Oxides; Secondary ion mass spectrometry; XRD; Experimental study; Thin films; Zinc oxides; II-VI semiconductors; Optical transmission; Reproducibility; Optical properties; Aluminium additions; Nitrogen additions; P type conductivity; Codoping
• ISSN: 0022-2461; 1573-4803
• DOI: 10.1007/s10853-005-2279-y

Reproducible and stable p-type ZnO thin films have been prepared by the N–Al codoping method. Secondary ion mass spectroscopy measurements demonstrate that N and Al are incorporated into ZnO. The resistivity, carrier concentration, and Hall mobility are typically of 50–100 Ωcm, 1×1017–8×1017 cm−3, and 0.1–0.6 cm2/Vs, respectively, for the N–Al codoped p-type ZnO films. Hall measurement, X-ray diffraction, and optical transmission were carried out to investigate the changes of the properties with the storage period. Results show that the p-type characteristics of the N–Al codoped ZnO films are of acceptable reproducibility and stability. In addition, the N–Al codoped p-type ZnO films have good crystallinity and optical quality. The properties are time independent.