Surface chemical states of barium zirconate titanate thin films prepared by chemical solution deposition

• Published in: Applied surface science Vol. 255; no. 21; pp. 8913 - 8916
• Main Authors: Jiang, L.L., Tang, X.G., Kuang, S.J., Xiong, H.F.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.08.2009; Elsevier
• Subjects: BZT thin films; Chemical solution deposition; Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Photoemission and photoelectron spectra; Physics; Single-crystal and powder diffraction; Structure and morphology; thickness; Structure of solids and liquids; crystallography; Surface chemical states; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; X-ray diffraction and scattering; X-ray photoelectron spectroscopy; 77.80.−e ;79.60.−I; Chemical solution deposition; 68.55.−a; 81.70.Jb; BZT thin films; Surface chemical states; 81.15.Gh; 81.15.Lm; 82.80.Pv; 81.65.Mq; X-ray photoelectron spectroscopy; Inorganic compounds; Barium Zirconates; Barium titanates; XRD; Surface states; Surface structure; Thin films; Grain size; Scanning electron microscopy; Chemical solution; 77.80.-e ;79.60.-1; 68.55.-a; Perovskites; Surface composition; Thickness; Silicon oxides; X-ray photoelectron spectra
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2009.06.092

Ba(Zr 0.05Ti 0.95)O 3 (BZT) thin films grown on Pt/Ti/SiO 2/Si(1 0 0) substrates were prepared by chemical solution deposition. The structural and surface morphology of BZT thin films has been studied by X-ray diffraction (XRD) and scanning electron microscope (SEM). The results showed that the random oriented BZT thin film grown on Pt/Ti/SiO 2/Si(1 0 0) substrate with a perovskite phase. The SEM surface image showed that the BZT thin film was crack-free. And the average grain size and thickness of the BZT film are 35 and 400 nm, respectively. Furthermore, the chemical states and chemical composition of the films were determined by X-ray photoelectron spectroscopy (XPS) near the surface. The XPS results show that Ba, Ti, and Zr exist mainly in the forms of BZT perovskite structure.