Deposition of TiSiN coatings by arc ion plating process

• Published in: Applied surface science Vol. 254; no. 10; pp. 3130 - 3136
• Main Authors: Guo, C.T., Lee, D., Chen, P.C.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.03.2008; Elsevier Science
• Subjects: Arc ion plating (AIP); Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Ion and electron beam-assisted deposition; ion plating; Materials science; Mechanical and acoustical properties; Methods of deposition of films and coatings; film growth and epitaxy; Physical properties of thin films, nonelectronic; Physics; Single-crystal and powder diffraction; Structure of solids and liquids; crystallography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); TiSiN; X-ray diffraction and scattering; XRD; TiSiN; XRD; Arc ion plating (AIP); Cutting tools; Inorganic compounds; Ternary compounds; Transition element compounds; Silicon nitride; Titanium nitride; Hardness; Adhesion; Texture; Thin films; Cutting; Lifetime; Ion plating; Bias voltage; Cathodes
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2007.10.079

Titanium silicon nitride (TiSiN) thin films were deposited on tungsten cemented carbide tools by cathode arc ion plating (AIP) process using alloy TiSi targets. The effects of silicon addition and negative substrate bias on the development of the textures of films were studied systematically by varying the bias voltage from −20 to −200 V. The structural features of the films were investigated in detail using X-ray diffraction. The effect of the texture on such mechanical properties as hardness and adhesion of the films was also studied. A maximum hardness of 42 GPa was obtained at a DC substrate bias of −150 V. The characteristics of TiSiN thin films exhibited excellent adhesion of over 150 N. The cutting performance of end-mills and drillers was evaluated by milling and drilling of highly hardened material under high-speed cutting conditions. The results reveal that cutting tools with TiSiN coatings markedly outperformed those with TiN coatings, and the uncoated cutting tools. TiSiN coating increased the cutting lifetime to seven times that of the uncoated one.