Circuit edit of superconducting microcircuits

Here we present a 'circuit edit' concept for superconducting microcircuits that operate at T < =4.2 K making use of superconducting material fabricated using focused ion beam induced deposition (FIBID) with W(CO)6 as the precursor gas. This material has been recently used to fabricate s...

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Bibliographic Details
Published inSuperconductor science & technology Vol. 22; no. 12; pp. 125020 - 125020 (5)
Main Authors Martínez-Pérez, M J, Sesé, J, Córdoba, R, Luis, F, Drung, D, Schurig, T
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.12.2009
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Summary:Here we present a 'circuit edit' concept for superconducting microcircuits that operate at T < =4.2 K making use of superconducting material fabricated using focused ion beam induced deposition (FIBID) with W(CO)6 as the precursor gas. This material has been recently used to fabricate superconducting nanowires with a critical temperature of 5.2 K. Circuit edit consists of using FIB technology with the possibilities for local patterning with nanometer resolution, to modify or repair highly valuable low- TC superconducting devices such SQUIDs, Josephson junction array voltage standards, or transition edge sensors.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0953-2048
1361-6668
DOI:10.1088/0953-2048/22/12/125020