Laser direct writing of palladium on polyimide surfaces from solution

• Published in: Applied surface science Vol. 152; no. 3; pp. 149 - 155
• Main Authors: Kordás, K, Bali, K, Leppävuori, S, Uusimäki, A, Nánai, L
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.11.1999; Elsevier Science
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Laser direct writing; LCLD; Metal deposition; Microelectronic fabrication (materials and surfaces technology); Palladium; Polyimide; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; EE; Laser direct writing; Polyimide; PB; Metal deposition; LC; 42.62; Palladium; XS; LCLD; PL; 61.80.B; Laser writing; Microelectronic fabrication; Electrical conductivity; Field electron microscopy; Transition metal; Experimental study; Microstructure; Adhesion
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/S0169-4332(99)00326-8

Conductive palladium (Pd) patterns were generated by laser-induced chemical liquid-phase deposition (LCLD) on polyimide (PI) substrates using a continuous Ar + laser beam. The deposition process was executed from the amine complex solution of Pd 2+ ions. Dependence of the characteristics of the laser direct written patterns on scanning speed of the laser beam, number of scans and laser power was examined. Deposits were characterised by Field Emission Scanning Electron Microscope (FESEM), Energy Dispersive Spectrometry (EDS), and profilometric measurements. The resistance of the patterns was also measured. It was found that good quality lines — narrow, homogeneous, and with high conductivity and adhesion — were achieved under optimized conditions.