Laser beam quality of high pulse repetition frequency excimer lasers

The influence of acoustic perturbations of an active disturbing medium on the far-field diffraction pattern is both theoretically and experimentally investigated. The theoretical results are in good agreement with experiments performed with a high repetition rate excimer laser (λ=308 nm, PRF=500 Hz)...

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Bibliographic Details
Published inOptics communications Vol. 102; no. 5; pp. 523 - 531
Main Authors Uteza, O.P., Sentis, M.L., Delaporte, Ph.C., Forestier, B.M., Fontaine, B.L.
Format Journal Article
LanguageEnglish
Published Amsterdam Elsevier B.V 15.10.1993
Elsevier Science
Elsevier
Subjects
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gas lasers including excimer and metal-vapor lasers
Lasers
Optics
Physics
Fraunhofer diffraction
Ultraviolet radiation
Acoustic properties
Radiation quality
High repetition rate
Binary compounds
Excimer lasers
Experimental study
Laser beams
Gas lasers
Pulses
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Summary:The influence of acoustic perturbations of an active disturbing medium on the far-field diffraction pattern is both theoretically and experimentally investigated. The theoretical results are in good agreement with experiments performed with a high repetition rate excimer laser (λ=308 nm, PRF=500 Hz). This theoretical approach explains the decrease of laser energy and fluence and the distortion of the beam shape in the far-field occuring in high pulse repetition frequency excimer lasers.
ISSN:0030-4018
1873-0310
DOI:10.1016/0030-4018(93)90432-5